1

SEM observation of the “orange peel effect” of materials

Year:
2007
Language:
english
File:
PDF, 587 KB
english, 2007
3

Thermally induced damages of PECVD SiNx thin films

Year:
2011
Language:
english
File:
PDF, 352 KB
english, 2011
8

Oxidation of PECVD SiNx thin films

Year:
2007
Language:
english
File:
PDF, 1.24 MB
english, 2007